Tohoku University and Rigaku Establish Joint Research Institute for X-ray Metrology
Tohoku University and Rigaku Corporation, a subsidiary of Rigaku Holdings Group, recently announced that they established the "Rigaku-Tohoku University X-ray Metrology Co-Creation Research Institute Beyond The Limits" on August 1, 2026, and commenced joint research. The institute will operate for a period of three years, until July 31, 2029, with the possibility of extension based on research outcomes. According to the announcement, the new institute will focus on upgrading X-ray metrology technologies, establishing new measurement methods, and nurturing the next generation of researchers. As semiconductor devices continue to shrink in size while becoming increasingly multi-layered and multi-material in composition, manufacturing processes are growing more complex, driving rising demand for high-precision, non-destructive evaluation of materials and structures. Existing measurement methods face limitations in evaluating fine structures and precisely analyzing depth-direction structures, making the development of new approaches such as soft X-ray techniques an important direction.
2026-08-27
