Tohoku University and Rigaku Establish Joint Research Institute for X-ray Metrology

Tohoku University and Rigaku Corporation, a subsidiary of Rigaku Holdings Group, recently announced that they established the "Rigaku-Tohoku University X-ray Metrology Co-Creation Research Institute Beyond The Limits" on August 1, 2026, and commenced joint research. The institute will operate for a period of three years, until July 31, 2029, with the possibility of extension based on research outcomes.

According to the announcement, the new institute will focus on upgrading X-ray metrology technologies, establishing new measurement methods, and nurturing the next generation of researchers. As semiconductor devices continue to shrink in size while becoming increasingly multi-layered and multi-material in composition, manufacturing processes are growing more complex, driving rising demand for high-precision, non-destructive evaluation of materials and structures. Existing measurement methods face limitations in evaluating fine structures and precisely analyzing depth-direction structures, making the development of new approaches such as soft X-ray techniques an important direction.

The institute will leverage the advantages of the next-generation synchrotron radiation facility "NanoTerasu" on the Tohoku University campus in the soft X-ray domain to develop metrology technologies for fine structures. It will also combine Tohoku University's research strengths in information science with Rigaku's experience in X-ray metrology to advance data analysis methodologies. Both parties stated that research will not be limited to a single topic but will address measurement challenges across various fields and targets requiring X-ray metrology that are difficult to solve with conventional technologies.

In the initial phase, the institute will prioritize the practical application of soft X-ray metrology in the semiconductor field and the enhancement of data analysis capabilities through information science. The outcomes are also planned to be expanded to fields such as electronic materials and functional materials, where precise understanding of fine structures and material states is required.

Talent development is also a key mission of the institute. Both parties plan to provide systematic learning opportunities covering the fundamentals of X-ray metrology and applications to new materials and new structures, and are considering incorporating relevant content into accredited formal courses. Additionally, Rigaku will establish a scholarship program to provide financial support to graduate students engaged in X-ray-related research topics, assisting them in developing their research results into degree theses and promoting the translation of such outcomes into practical metrology technologies.